FEA in Micro - Electro - Mechanical Systems ( MEMS ) Applications : A Micromachined
نویسنده
چکیده
منابع مشابه
Low-Power Micromachined Microsystems
Micromachined microsystems and Micro Electro Mechanical Systems (MEMS) have made possible the development of highly accurate and portable sensors and instrument for a variety of applications in the health care, industrial, consumer products, avionics, and defense. Design of low-power circuits for these applications, and use of micromachined sensors and actuators in combination with integrated c...
متن کاملElectro-Mechanical Transducer for MEMS Analysis in ANSYS
The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.
متن کاملPolymer Guided Wave Integrated Optics: An Enabling Technology for Micro-Opto-Electro-Mechanical Systems
Efficient merging of optical, microelectromechanical (MEM) and microelectronic systems offers significant potential for achieving the crooptoe1ectromechanical (MOEM) system functionality necessary to meet the performance needs of a number of emerging display, sensing, communications, and control applications. Central to realization of this potential will be the development of a set of microopti...
متن کاملFractional Order Control of Micro Electro-Mechanical Systems
This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...
متن کاملGenerating and Focusing the Ultrasound Waves Using Elastomer-based Capacitive Micro-Speakers
Ultrasound wave is a kind of waves with the frequency higher than the human audible frequency. Although ultrasound was first used for military identification purposes, it has been used for decades for various other applications, especially medical applications. Medical applications of ultrasound include diagnostic and therapeutic applications, such as for the treatment of cancer. In this paper,...
متن کامل